Framed 300mm Wafers in a Closed, Automated FOUP
After a 300mm wafer is mounted on tape for dicing, it sits on a 380mm film frame. The Frame FOUP is built for that frame, so framed wafers can move through automated back-end lines the same way whole wafers move through the fab.
The Frame FOUP holds up to 13 metal or plastic film frames of 380mm flat-to-flat on a 10mm pitch. The frames slide into molded slots that support them at the frame, so the tape and the wafer are not touched.
The pod uses kinematic coupling for precise alignment on the load port, and a top robotic flange for OHT. It follows SEMI E193 and E62 and runs on film frame FOUP load ports (SEMI E199), OHT, AGVs and stockers. It does not run on the wafer FOUP load port.
Cover, handles, robotic flange and RFID tag are common to every version; only the base changes. One base is closed, the other has an open base with a valve for N₂ purge. Handles come in white, red, green, blue or black, and the rear window is clear, amber or ESD opaque. Info tags and a horizontal or vertical RFID position are options.
The Frame FOUP is molded from ultrapure, low-outgassing materials and can be cleaned without taking it apart. For 200mm wafers on 276mm frames, see the modular eFOUP with its 25-slot frame insert and the film frame shippers.
