One 25-Slot Format in Two Material Grades
The 300mm open cassette holds 25 wafers of 300mm (12-inch) in open slots, for transport, storage and loading into process equipment. ePAK makes it in two material grades on the same format, so the choice comes down to the process conditions the cassette has to handle.
One format. Both versions have 25 slots at a 10.00mm pitch and the same outside dimensions of 332.9 x 310.8 x 303.9mm. The wafers stand in slots between two end walls. The sides stay open, so wafers can be reached, checked and transferred without taking the cassette apart.
Polyethersulfone (PES). The PES version is molded in natural polyethersulfone, eM-179-NAT, which gives it its amber color. It is the material grade for steps with chemical exposure. The PES version is not available with RFID.
Polycarbonate (PC). The PC version is molded in clear polycarbonate, eM-175-CLR. The clear body shows the wafer stack at a glance. It is the version to choose when the cassette needs RFID: ePAK supplies it with an RFID tag.
Handles and orientation. Each cassette carries two handles for manual transfer: natural ABS, eM-123-NAT, as standard, or white PC. The cassette is designed to be used in both a vertical and a horizontal position.
Chemistry and temperature. Which grade suits a process depends on the chemistry, the concentration, the temperature and the exposure time. Send ePAK your process conditions and test the cassette in your own chemistry before use. For smaller wafers, ePAK makes process boats in PP, PVDF, PFA and PEEK.
